Nanofabrication facility

The Nanofabrication Facility focuses on the design and development of nanofabrication methods and techniques for nanoscience and nanotechnology research and applications. The mission of the facility is to provide high quality services to both internal and external users.

Available techniques

  • Electron Beam Lithography (EBL)
  • Focused Ion Beam Lithography (FIB)
  • Thermal and UV Nanoimprint (NIL)
  • Atomic Force Microscope (AFM)
  • E-beam evaporation
  • Sputter coater
  • Plasma cleaner
  • Wedge Wire bonder
  • Spin coater
  • Optical Microscope