Nanofabrication Facility
Available techniques
- Electron-beam lithography (EBL)
- Direct write laser UV lithography (DWL)
- UV mask aligner
- E-beam evaporation
- ICP-RIE plasma dry etching
- Plasma cleaning
- Wedge wire bonding
- Spin coating
- Optical microscopy
- 3D optical profiler
- Stylus profilometer