- Title
- Si nanopillars
- Technique
- FEI Magellan 400L XRSEM
- Description
- The Si nanopillars with Au cap and pn junction are around 150 nm in diameter and 1 micrometer in length. They can be fabricated through several nanofabrication processes including e-beam evaporation, electrostatic colloidal lithography, reactive ion etching and Bosch process.