03 March

Nanofabrication Facility: Overview on Tools & Processes

Tuesday 03 March 2020, 12:00pm

ICN2 Seminar Hall, ICN2 Building, UAB

Raúl Pérez, Research Engineer, Nanofabrication Facility at ICN2

Abstract:  In this seminar, we will present an update on the current Nanofabrication Facility status. We will briefly show the environmentally controlled facility characteristics and then we will make more emphasis on the installed equipment and processes developed so far.

We will make a basic introduction to the main three areas involved in a micro/nano fabrication process: lithography, etching and thin film deposition. We will go through all the steps involved in a full UV photolithographic process with special attention to the exposure step, we will give some insight into the main dry plasma etching characteristics and we will review all the materials available for thin film deposition.

Together with the different techniques, we will present our equipment specifications and characteristics. Moreover, some examples of ICN2 developed processes and recipes will be shown