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PhD: Christian Schäfer

Directors:Prof. Jose A. Garrido, Advanced Electronic Materials and Devices Group Leader

Abstract: This dissertation focuses on metal-organic chemical vapor deposition (MOCVD) as a promising method for synthesizing large-area, two-dimensional MoS2 films. It includes a comprehensive investigation of growth parameters and addresses the pressing issue and mitigation of carbon contamination, which can arise from the use of organic precursor chemistry. Strategies to reduce grain boundary defects through domain size enhancement and van der Waals heteroepitaxy are also explored. Additionally, a monolithically integrated MoS2 field-effect transistor technology is developed for a proof-of-concept of multiplexed, flexible neural interface devices