02 June

Current status and challenges in hBN growth by chemical vapor deposition

Friday 02 June 2023, 10:00am

ICN2 Seminar Room, Campus UAB

By Dr Hyeon Suk Shin, Department of Chemistry, Ulsan National University of Science and Technology, Republic of Korea

Abstract: Hexagonal boron nitride (hBN) is a promising two-dimensional (2D) material owing to its unique optical properties in the deep-UV region, mechanical robustness, thermal stability, and chemical inertness. hBN thin films have gained significant attention for various applications, including nanoelectronics, photonics, single photon emission, anti-corrosion, and membranes. Thus, wafer-scale growth of hBN films is crucial to enable their industrial-scale applications. In this regard, chemical vapor deposition (CVD) is a promising method for scalable high-quality films. To date, considerable efforts have been made to develop continuous hBN thin films with high crystallinity, from those with large grains to single-crystal ones, and to realize thickness control of hBN films by CVD. However, the growth of wafer-scale high crystalline hBN films with precise thickness control has not been reported yet. The hBN growth is significantly affected by substrate, in particular the type of metals, because the intrinsic solubilities of boron and nitrogen depend on the type of metal. In this talk, state-of-the-art strategies adopted for growing wafer-scale, highly crystalline hBN are summarized, followed by the proposed mechanisms of hBN growth on catalytic substrates. Furthermore, various applications of the hBN thin films are demonstrated, including a dielectric layer, an encapsulation layer, a wrapping layer of gold nanoparticles for surface enhanced Raman scattering, a proton-exchange membrane, a template for growth of other 2D materials or nanomaterials, and a platform of fabricating in-plane heterostructures. In addition, amorphous BN (aBN) as a counterpart of crystalline hBN is introduced. aBN with ultra-low dielectric constant (< 2.5) shows great potential for its applications in Cu interconnects of integrated circuits.

Hosted by Prof. Stephan Roche, Theoretical and Computational Nanoscience Group Leader at ICN2.