Digital Holographic Microscope (DHM) for 3D characterization of surface sample and/or MEMS deformation.

Interferometric microscope/profilometer with a vertical resolution of <1nm and lateral resolution diffraction-limited by the optics (<1µm). We have several lenses that cover different ranges of field-of-view, from c.a. 1mm down to c.a. 100µm. 

Our DHM is stroboscopically synchronized to a voltage source that allows it to measure voltage-induced deformations in MEMS at a frequency rate from 1Hz up to 25MHz. The DHM can also acquire live-view videos to capture dynamic changes in surface profile.