03 November

Nanoelectromechanical System (NEMS) Sensors Based on Graphene Membranes

Thursday 03 November 2022, 03:00pm

ICN2 Seminar Room, Campus UAB, Bellaterra, Barcelona

Nanoseminar in Physics

SpeakerProf. Frank Niklaus, Division of Micro and Nanosystems, KTH Royal Institute of Technology, Stockholm, Sweden

Abstract: Graphene has great potential as structural and transducer material in NEMS sensors featuring ultra-small size and competitive sensitivities. In this presentation we will discuss examples of NEMS sensor demonstrators utilizing graphene membranes and provide an overview of graphene NEMS sensors demonstrated in literature, including different types of graphene pressure sensors, resonators, and accelerometers. We discuss suitable transduction mechanisms that are relevant for use in NEMS sensors, including piezoresistive and resonant transduction. We also discuss graphene integration and fabrication technologies suitable for graphene NEMS that are compatible with the existing semiconductor manufacturing infrastructure.

Introductory talk: "Effect of flexoelectricity on the nanomechanical properties of ferroelectric materials” by Dr. Kumara Cordero, Postdoctoral Researcher at Oxide Nanophysics Group at ICN2 

Hosted by Dr Aron Cummings, Seniro Researcher at Theoretical and Computational Nanoscience Group.

After the seminar, a coffee service will be available at the room for attendees.