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Electron Beam Lithography (EBL)

Electron beam lithography (EBL) is a fundamental technique in nanofabrication. It is maskless form of lithography used for the fabrication of micro- and nanostructures.

In EBL, a focused beam of electrons is used to form a designed pattern across a sample covered with electron sensitive thin resist film. Structures with micro- and nanometric dimensions are created in the resist and subsequently transferred to the substrate material by either etching or lift-off processes.

The eLINE Plus system from Raith GmbH is a powerful, modularly expandable research tool uniting the worlds of advanced electron beam lithography (EBL), nanoengineering, and ultra-high-resolution imaging & analysis. The system is equipped with 30keV Thermal Field Emission (TFE) filament technology offering down to 8nm lithography resolution in all operational modes on substrates up to 4” wafers. This system with its state-of-the-art laser interferometer-controlled stage ensures movement and pattern placement accuracies in the nm-regime and free-stitching patterning on large areas. It is also equipped with a gas injection system (GIS) for electron-beam induced deposition (EBID) which will allow the patterning of thin metal electrodes (Pt,W) with few nm lateral resolution.

Technical specifications

Manufacturer: Raith GmbH
Model: eLINE Plus

High stability Schottky field emission gun
HV energy: 20eV - 30keV
Probe current: 5pA to 20nA
Fast 20MHz Pattern Generator
Laser interferometer stage (1nm positioning resolution)
Up to 4”wafer substrate size (non-standard 6” option also available)
Equipped with loadlock for easy and fast samples loading
Single Gas Injection System (GIS) enables the deposition of finely shaped metallic (Pt, W) and insulating (SiO₂) microstructures (EBID, IBID)
Raith proprietary Traxx and Periodixx (large area stitching free modes) available
True multi user management by user authentication and related specific system setup and parameter administration; Users find their system as they have left it