Digital Holographic Microscope (DHM)

Digital Holographic Microscope (DHM) for 3D characterization of surface sample and/or MEMS deformation.

Interferometric microscope/profilometer with a vertical resolution of <1nm and lateral resolution diffraction-limited by the optics (<1µm). We have several lenses that cover different ranges of field-of-view, from c.a. 1mm down to c.a. 100µm. 

Our DHM is stroboscopically synchronized to a voltage source that allows it to measure voltage-induced deformations in MEMS at a frequency rate from 1Hz up to 25MHz. The DHM can also acquire live-view videos to capture dynamic changes in surface profile. 

Brand/model: Lyncee-Tec DHM (https://www.lynceetec.com/)

Examples of use: 

• http://www.nature.com/nnano/journal/v11/n3/abs/nnano.2015.260.html
• http://pubs.rsc.org/en/Content/ArticleLanding/2016/NR/c5nr06514c#!divAbstract