Nanofabrication facility - Equipment - Characterization

Characterization

Characterisation and imaging is a key phase of most fabrication processes as a test point in the development cycle. As such, ICN2 Nanofabrication Facility features a broad range of instruments which are capable of achieving high resolution images, topographical imaging, measurements of films stress as well as surface steps and roughness imaging, amongst others.

Technique	Instrument	Defining feature
FEG-SEM	FEI Inspect F50	High resolution surface topography imaging.
Stylus Profilometer	KLA Tencor – Alphastep D500	Characterises the surface steps and roughness of a material.
Optical 3D Profiler	Filmetrics – Profilm 3D	Non-contact mapping of surface topology. 3D imaging
Optical microscope	Nikon – Eclipse 150L	Up to x100 magnification