Nanofabrication facility - Equipment - Thin film deposition

Thin film deposition

Thin film deposition is a process whereby materials - generally precious metals or oxides - are deposited onto a substrate or lithography sample. This can be achieved in a variety of ways such as sputtering, electroplating, evaporation, or CVD. ICN2 Nanofabrication Facility offers a range of different thin film deposition techniques and instruments, which are briefly explained here.

Process

Instrument

Main property

E-beam Evaporation

AJA Orion

Directional coating

RF/DC Sputter evaporation

AJA Orion

Conformal coating

Sputter coater

Edwards 350B

Conformal coating