Nanofabrication facility - Equipment - Thin film deposition

Thin film deposition

Thin film deposition is a process whereby materials - generally precious metals or oxides - are deposited onto a substrate or lithography sample. This can be achieved in a variety of ways such as sputtering, electroplating, evaporation, or CVD. ICN2 Nanofabrication Facility offers a range of different thin film deposition techniques and instruments, which are briefly explained here.

Process	Instrument	Main property
E-beam Evaporation	AJA Orion	Directional coating
Ebeam + sputtering	Alliance Concept EVA601	Directional and Conformal coating