Nanofabrication facility - Equipment - Thin film deposition
Thin film deposition
Thin film deposition is a process whereby materials - generally precious metals or oxides - are deposited onto a substrate or lithography sample. This can be achieved in a variety of ways such as sputtering, electroplating, evaporation, or CVD. ICN2 Nanofabrication Facility offers a range of different thin film deposition techniques and instruments, which are briefly explained here.
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Process |
Instrument |
Main property |
|---|---|---|
|
AJA Orion |
Directional coating |